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Your Current Position: PRODUCTS AND SERVICES > Inline Equipment Series

Inline TCO Coating Equipment (Reactive Plasma Deposition, RPD/PAR),and Magnetron Sputter,PVD

In-line physical coating equipment for Transparent Conductive Oxide (TCO) coating on wafer,glass plate or flexible substrate.
HJT Inline PECVD

Intrinsic film deposition & a-si film doping.

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